license
identifier
contributor
created
1990-07-24T00:00:00
license
modified
2001-07-26T22:00:47
2005-07-13T15:41:11
2005-07-13T15:41:15
2010-04-23T04:37:56
2010-04-23T04:37:57
2011-01-07T17:27:46
2011-01-07T17:27:48
source
inDataset
broaderGeneric
broaderPreferred
displayOrder
parentString
etching ground, resist, surfac ...... erarchy name), Materials Facet
parentStringAbbrev
etching ground, resist, ... Materials Facet