license
identifier
contributor
created
1990-07-23T00:00:00
license
modified
2001-07-26T22:00:44
2010-04-23T04:37:46
2010-04-23T04:37:47
2011-01-07T17:27:26
2011-01-07T17:27:28
2012-01-20T15:05:15
2012-01-20T15:05:16
source
inDataset
broaderGeneric
broaderPreferred
displayOrder
parentString
resist, surface preparation ma ...... erarchy name), Materials Facet
parentStringAbbrev
resist, surface preparation materials, ... Materials Facet